Global III-V ICP Compound Semiconductor Etch System Market Growth 2025-2031

September 2025 | 111 pages | ID: G5D5EAC0BB5EEN
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The global III-V ICP Compound Semiconductor Etch System market size is predicted to grow from US$ 363 million in 2025 to US$ 572 million in 2031; it is expected to grow at a CAGR of 7.9% from 2025 to 2031.

The impact of the latest U.S. tariff measures and the corresponding policy responses from countries worldwide on market competitiveness, regional economic performance, and supply chain configurations will be comprehensively evaluated in this report.

The inductively coupled plasma reactive ion etching (ICP-RIE) is a selective dry etching method used in fabrication technology of various semiconductor devices.

Following a strong growth of 26.2 percent in the year 2021, WSTS revised it down to a single digit growth for the worldwide semiconductor market in 2022 with a total size of US$580 billion, up 4.4 percent. WSTS lowered growth estimation as inflation rises and end markets seeing weaker demand, especially those exposed to consumer spending. While some major categories are still double-digit year-over-year growth in 2022, led by Analog with 20.8 percent, Sensors with 16.3 percent, and Logic with 14.5 percent growth. Memory declined with 12.6 percent year over year. In 2022, all geographical regions showed double-digit growth except Asia Pacific. The largest region, Asia Pacific, declined 2.0 percent. Sales in the Americas were US$142.1 billion, up 17.0% year-on-year, sales in Europe were US$53.8 billion, up 12.6% year-on-year, and sales in Japan were US$48.1 billion, up 10.0% year-on-year. However, sales in the largest Asia-Pacific region were US$336.2 billion, down 2.0% year-on-year.

LP Information, Inc. (LPI) ' newest research report, the “III-V ICP Compound Semiconductor Etch System Industry Forecast” looks at past sales and reviews total world III-V ICP Compound Semiconductor Etch System sales in 2024, providing a comprehensive analysis by region and market sector of projected III-V ICP Compound Semiconductor Etch System sales for 2025 through 2031. With III-V ICP Compound Semiconductor Etch System sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world III-V ICP Compound Semiconductor Etch System industry.

This Insight Report provides a comprehensive analysis of the global III-V ICP Compound Semiconductor Etch System landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on III-V ICP Compound Semiconductor Etch System portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global III-V ICP Compound Semiconductor Etch System market.

This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for III-V ICP Compound Semiconductor Etch System and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global III-V ICP Compound Semiconductor Etch System.

This report presents a comprehensive overview, market shares, and growth opportunities of III-V ICP Compound Semiconductor Etch System market by product type, application, key manufacturers and key regions and countries.

Segmentation by Type:
  • GaAs Etch System
  • InP Etch System
  • GaN Etch System
  • Others
Segmentation by Application:
  • Logic and Memory
  • MEMS
  • Power Device
  • Others
This report also splits the market by region:
  • Americas
    • United States
    • Canada
    • Mexico
    • Brazil
  • APAC
    • China
    • Japan
    • Korea
    • Southeast Asia
    • India
    • Australia
  • Europe
    • Germany
    • France
    • UK
    • Italy
    • Russia
  • Middle East & Africa
    • Egypt
    • South Africa
    • Israel
    • Turkey
    • GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
  • Lam Research
  • Applied Materials
  • Hitachi High-tech
  • Tokyo Electron
  • Oxford Instruments
  • NAURA Technology Group
  • SPTS Technologies Ltd.
  • AMEC
  • Ulvac
  • Samco
  • Sentech
Key Questions Addressed in this Report

What is the 10-year outlook for the global III-V ICP Compound Semiconductor Etch System market?

What factors are driving III-V ICP Compound Semiconductor Etch System market growth, globally and by region?

Which technologies are poised for the fastest growth by market and region?

How do III-V ICP Compound Semiconductor Etch System market opportunities vary by end market size?

How does III-V ICP Compound Semiconductor Etch System break out by Type, by Application?
1 SCOPE OF THE REPORT

1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats

2 EXECUTIVE SUMMARY

2.1 World Market Overview
  2.1.1 Global III-V ICP Compound Semiconductor Etch System Annual Sales 2020-2031
  2.1.2 World Current & Future Analysis for III-V ICP Compound Semiconductor Etch System by Geographic Region, 2020, 2024 & 2031
  2.1.3 World Current & Future Analysis for III-V ICP Compound Semiconductor Etch System by Country/Region, 2020, 2024 & 2031
2.2 III-V ICP Compound Semiconductor Etch System Segment by Type
  2.2.1 GaAs Etch System
  2.2.2 InP Etch System
  2.2.3 GaN Etch System
  2.2.4 Others
2.3 III-V ICP Compound Semiconductor Etch System Sales by Type
  2.3.1 Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Type (2020-2025)
  2.3.2 Global III-V ICP Compound Semiconductor Etch System Revenue and Market Share by Type (2020-2025)
  2.3.3 Global III-V ICP Compound Semiconductor Etch System Sale Price by Type (2020-2025)
2.4 III-V ICP Compound Semiconductor Etch System Segment by Application
  2.4.1 Logic and Memory
  2.4.2 MEMS
  2.4.3 Power Device
  2.4.4 Others
2.5 III-V ICP Compound Semiconductor Etch System Sales by Application
  2.5.1 Global III-V ICP Compound Semiconductor Etch System Sale Market Share by Application (2020-2025)
  2.5.2 Global III-V ICP Compound Semiconductor Etch System Revenue and Market Share by Application (2020-2025)
  2.5.3 Global III-V ICP Compound Semiconductor Etch System Sale Price by Application (2020-2025)

3 GLOBAL BY COMPANY

3.1 Global III-V ICP Compound Semiconductor Etch System Breakdown Data by Company
  3.1.1 Global III-V ICP Compound Semiconductor Etch System Annual Sales by Company (2020-2025)
  3.1.2 Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Company (2020-2025)
3.2 Global III-V ICP Compound Semiconductor Etch System Annual Revenue by Company (2020-2025)
  3.2.1 Global III-V ICP Compound Semiconductor Etch System Revenue by Company (2020-2025)
  3.2.2 Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Company (2020-2025)
3.3 Global III-V ICP Compound Semiconductor Etch System Sale Price by Company
3.4 Key Manufacturers III-V ICP Compound Semiconductor Etch System Producing Area Distribution, Sales Area, Product Type
  3.4.1 Key Manufacturers III-V ICP Compound Semiconductor Etch System Product Location Distribution
  3.4.2 Players III-V ICP Compound Semiconductor Etch System Products Offered
3.5 Market Concentration Rate Analysis
  3.5.1 Competition Landscape Analysis
  3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2023-2025)
3.6 New Products and Potential Entrants
3.7 Market M&A Activity & Strategy

4 WORLD HISTORIC REVIEW FOR III-V ICP COMPOUND SEMICONDUCTOR ETCH SYSTEM BY GEOGRAPHIC REGION

4.1 World Historic III-V ICP Compound Semiconductor Etch System Market Size by Geographic Region (2020-2025)
  4.1.1 Global III-V ICP Compound Semiconductor Etch System Annual Sales by Geographic Region (2020-2025)
  4.1.2 Global III-V ICP Compound Semiconductor Etch System Annual Revenue by Geographic Region (2020-2025)
4.2 World Historic III-V ICP Compound Semiconductor Etch System Market Size by Country/Region (2020-2025)
  4.2.1 Global III-V ICP Compound Semiconductor Etch System Annual Sales by Country/Region (2020-2025)
  4.2.2 Global III-V ICP Compound Semiconductor Etch System Annual Revenue by Country/Region (2020-2025)
4.3 Americas III-V ICP Compound Semiconductor Etch System Sales Growth
4.4 APAC III-V ICP Compound Semiconductor Etch System Sales Growth
4.5 Europe III-V ICP Compound Semiconductor Etch System Sales Growth
4.6 Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales Growth

5 AMERICAS

5.1 Americas III-V ICP Compound Semiconductor Etch System Sales by Country
  5.1.1 Americas III-V ICP Compound Semiconductor Etch System Sales by Country (2020-2025)
  5.1.2 Americas III-V ICP Compound Semiconductor Etch System Revenue by Country (2020-2025)
5.2 Americas III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025)
5.3 Americas III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil

6 APAC

6.1 APAC III-V ICP Compound Semiconductor Etch System Sales by Region
  6.1.1 APAC III-V ICP Compound Semiconductor Etch System Sales by Region (2020-2025)
  6.1.2 APAC III-V ICP Compound Semiconductor Etch System Revenue by Region (2020-2025)
6.2 APAC III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025)
6.3 APAC III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan

7 EUROPE

7.1 Europe III-V ICP Compound Semiconductor Etch System by Country
  7.1.1 Europe III-V ICP Compound Semiconductor Etch System Sales by Country (2020-2025)
  7.1.2 Europe III-V ICP Compound Semiconductor Etch System Revenue by Country (2020-2025)
7.2 Europe III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025)
7.3 Europe III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia

8 MIDDLE EAST & AFRICA

8.1 Middle East & Africa III-V ICP Compound Semiconductor Etch System by Country
  8.1.1 Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales by Country (2020-2025)
  8.1.2 Middle East & Africa III-V ICP Compound Semiconductor Etch System Revenue by Country (2020-2025)
8.2 Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025)
8.3 Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries

9 MARKET DRIVERS, CHALLENGES AND TRENDS

9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends

10 MANUFACTURING COST STRUCTURE ANALYSIS

10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of III-V ICP Compound Semiconductor Etch System
10.3 Manufacturing Process Analysis of III-V ICP Compound Semiconductor Etch System
10.4 Industry Chain Structure of III-V ICP Compound Semiconductor Etch System

11 MARKETING, DISTRIBUTORS AND CUSTOMER

11.1 Sales Channel
  11.1.1 Direct Channels
  11.1.2 Indirect Channels
11.2 III-V ICP Compound Semiconductor Etch System Distributors
11.3 III-V ICP Compound Semiconductor Etch System Customer

12 WORLD FORECAST REVIEW FOR III-V ICP COMPOUND SEMICONDUCTOR ETCH SYSTEM BY GEOGRAPHIC REGION

12.1 Global III-V ICP Compound Semiconductor Etch System Market Size Forecast by Region
  12.1.1 Global III-V ICP Compound Semiconductor Etch System Forecast by Region (2026-2031)
  12.1.2 Global III-V ICP Compound Semiconductor Etch System Annual Revenue Forecast by Region (2026-2031)
12.2 Americas Forecast by Country (2026-2031)
12.3 APAC Forecast by Region (2026-2031)
12.4 Europe Forecast by Country (2026-2031)
12.5 Middle East & Africa Forecast by Country (2026-2031)
12.6 Global III-V ICP Compound Semiconductor Etch System Forecast by Type (2026-2031)
12.7 Global III-V ICP Compound Semiconductor Etch System Forecast by Application (2026-2031)

13 KEY PLAYERS ANALYSIS

13.1 Lam Research
  13.1.1 Lam Research Company Information
  13.1.2 Lam Research III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.1.3 Lam Research III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.1.4 Lam Research Main Business Overview
  13.1.5 Lam Research Latest Developments
13.2 Applied Materials
  13.2.1 Applied Materials Company Information
  13.2.2 Applied Materials III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.2.3 Applied Materials III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.2.4 Applied Materials Main Business Overview
  13.2.5 Applied Materials Latest Developments
13.3 Hitachi High-tech
  13.3.1 Hitachi High-tech Company Information
  13.3.2 Hitachi High-tech III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.3.3 Hitachi High-tech III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.3.4 Hitachi High-tech Main Business Overview
  13.3.5 Hitachi High-tech Latest Developments
13.4 Tokyo Electron
  13.4.1 Tokyo Electron Company Information
  13.4.2 Tokyo Electron III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.4.3 Tokyo Electron III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.4.4 Tokyo Electron Main Business Overview
  13.4.5 Tokyo Electron Latest Developments
13.5 Oxford Instruments
  13.5.1 Oxford Instruments Company Information
  13.5.2 Oxford Instruments III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.5.3 Oxford Instruments III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.5.4 Oxford Instruments Main Business Overview
  13.5.5 Oxford Instruments Latest Developments
13.6 NAURA Technology Group
  13.6.1 NAURA Technology Group Company Information
  13.6.2 NAURA Technology Group III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.6.3 NAURA Technology Group III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.6.4 NAURA Technology Group Main Business Overview
  13.6.5 NAURA Technology Group Latest Developments
13.7 SPTS Technologies Ltd.
  13.7.1 SPTS Technologies Ltd. Company Information
  13.7.2 SPTS Technologies Ltd. III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.7.3 SPTS Technologies Ltd. III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.7.4 SPTS Technologies Ltd. Main Business Overview
  13.7.5 SPTS Technologies Ltd. Latest Developments
13.8 AMEC
  13.8.1 AMEC Company Information
  13.8.2 AMEC III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.8.3 AMEC III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.8.4 AMEC Main Business Overview
  13.8.5 AMEC Latest Developments
13.9 Ulvac
  13.9.1 Ulvac Company Information
  13.9.2 Ulvac III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.9.3 Ulvac III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.9.4 Ulvac Main Business Overview
  13.9.5 Ulvac Latest Developments
13.10 Samco
  13.10.1 Samco Company Information
  13.10.2 Samco III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.10.3 Samco III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.10.4 Samco Main Business Overview
  13.10.5 Samco Latest Developments
13.11 Sentech
  13.11.1 Sentech Company Information
  13.11.2 Sentech III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
  13.11.3 Sentech III-V ICP Compound Semiconductor Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
  13.11.4 Sentech Main Business Overview
  13.11.5 Sentech Latest Developments

14 RESEARCH FINDINGS AND CONCLUSION

LIST OF TABLES

Table 1. III-V ICP Compound Semiconductor Etch System Annual Sales CAGR by Geographic Region (2020, 2024 & 2031) & ($ millions)
Table 2. III-V ICP Compound Semiconductor Etch System Annual Sales CAGR by Country/Region (2020, 2024 & 2031) & ($ millions)
Table 3. Major Players of GaAs Etch System
Table 4. Major Players of InP Etch System
Table 5. Major Players of GaN Etch System
Table 6. Major Players of Others
Table 7. Global III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025) & (K Units)
Table 8. Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Type (2020-2025)
Table 9. Global III-V ICP Compound Semiconductor Etch System Revenue by Type (2020-2025) & ($ million)
Table 10. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Type (2020-2025)
Table 11. Global III-V ICP Compound Semiconductor Etch System Sale Price by Type (2020-2025) & (US$/Unit)
Table 12. Global III-V ICP Compound Semiconductor Etch System Sale by Application (2020-2025) & (K Units)
Table 13. Global III-V ICP Compound Semiconductor Etch System Sale Market Share by Application (2020-2025)
Table 14. Global III-V ICP Compound Semiconductor Etch System Revenue by Application (2020-2025) & ($ million)
Table 15. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Application (2020-2025)
Table 16. Global III-V ICP Compound Semiconductor Etch System Sale Price by Application (2020-2025) & (US$/Unit)
Table 17. Global III-V ICP Compound Semiconductor Etch System Sales by Company (2020-2025) & (K Units)
Table 18. Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Company (2020-2025)
Table 19. Global III-V ICP Compound Semiconductor Etch System Revenue by Company (2020-2025) & ($ millions)
Table 20. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Company (2020-2025)
Table 21. Global III-V ICP Compound Semiconductor Etch System Sale Price by Company (2020-2025) & (US$/Unit)
Table 22. Key Manufacturers III-V ICP Compound Semiconductor Etch System Producing Area Distribution and Sales Area
Table 23. Players III-V ICP Compound Semiconductor Etch System Products Offered
Table 24. III-V ICP Compound Semiconductor Etch System Concentration Ratio (CR3, CR5 and CR10) & (2023-2025)
Table 25. New Products and Potential Entrants
Table 26. Market M&A Activity & Strategy
Table 27. Global III-V ICP Compound Semiconductor Etch System Sales by Geographic Region (2020-2025) & (K Units)
Table 28. Global III-V ICP Compound Semiconductor Etch System Sales Market Share Geographic Region (2020-2025)
Table 29. Global III-V ICP Compound Semiconductor Etch System Revenue by Geographic Region (2020-2025) & ($ millions)
Table 30. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Geographic Region (2020-2025)
Table 31. Global III-V ICP Compound Semiconductor Etch System Sales by Country/Region (2020-2025) & (K Units)
Table 32. Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Country/Region (2020-2025)
Table 33. Global III-V ICP Compound Semiconductor Etch System Revenue by Country/Region (2020-2025) & ($ millions)
Table 34. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Country/Region (2020-2025)
Table 35. Americas III-V ICP Compound Semiconductor Etch System Sales by Country (2020-2025) & (K Units)
Table 36. Americas III-V ICP Compound Semiconductor Etch System Sales Market Share by Country (2020-2025)
Table 37. Americas III-V ICP Compound Semiconductor Etch System Revenue by Country (2020-2025) & ($ millions)
Table 38. Americas III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025) & (K Units)
Table 39. Americas III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025) & (K Units)
Table 40. APAC III-V ICP Compound Semiconductor Etch System Sales by Region (2020-2025) & (K Units)
Table 41. APAC III-V ICP Compound Semiconductor Etch System Sales Market Share by Region (2020-2025)
Table 42. APAC III-V ICP Compound Semiconductor Etch System Revenue by Region (2020-2025) & ($ millions)
Table 43. APAC III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025) & (K Units)
Table 44. APAC III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025) & (K Units)
Table 45. Europe III-V ICP Compound Semiconductor Etch System Sales by Country (2020-2025) & (K Units)
Table 46. Europe III-V ICP Compound Semiconductor Etch System Revenue by Country (2020-2025) & ($ millions)
Table 47. Europe III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025) & (K Units)
Table 48. Europe III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025) & (K Units)
Table 49. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales by Country (2020-2025) & (K Units)
Table 50. Middle East & Africa III-V ICP Compound Semiconductor Etch System Revenue Market Share by Country (2020-2025)
Table 51. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales by Type (2020-2025) & (K Units)
Table 52. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales by Application (2020-2025) & (K Units)
Table 53. Key Market Drivers & Growth Opportunities of III-V ICP Compound Semiconductor Etch System
Table 54. Key Market Challenges & Risks of III-V ICP Compound Semiconductor Etch System
Table 55. Key Industry Trends of III-V ICP Compound Semiconductor Etch System
Table 56. III-V ICP Compound Semiconductor Etch System Raw Material
Table 57. Key Suppliers of Raw Materials
Table 58. III-V ICP Compound Semiconductor Etch System Distributors List
Table 59. III-V ICP Compound Semiconductor Etch System Customer List
Table 60. Global III-V ICP Compound Semiconductor Etch System Sales Forecast by Region (2026-2031) & (K Units)
Table 61. Global III-V ICP Compound Semiconductor Etch System Revenue Forecast by Region (2026-2031) & ($ millions)
Table 62. Americas III-V ICP Compound Semiconductor Etch System Sales Forecast by Country (2026-2031) & (K Units)
Table 63. Americas III-V ICP Compound Semiconductor Etch System Annual Revenue Forecast by Country (2026-2031) & ($ millions)
Table 64. APAC III-V ICP Compound Semiconductor Etch System Sales Forecast by Region (2026-2031) & (K Units)
Table 65. APAC III-V ICP Compound Semiconductor Etch System Annual Revenue Forecast by Region (2026-2031) & ($ millions)
Table 66. Europe III-V ICP Compound Semiconductor Etch System Sales Forecast by Country (2026-2031) & (K Units)
Table 67. Europe III-V ICP Compound Semiconductor Etch System Revenue Forecast by Country (2026-2031) & ($ millions)
Table 68. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales Forecast by Country (2026-2031) & (K Units)
Table 69. Middle East & Africa III-V ICP Compound Semiconductor Etch System Revenue Forecast by Country (2026-2031) & ($ millions)
Table 70. Global III-V ICP Compound Semiconductor Etch System Sales Forecast by Type (2026-2031) & (K Units)
Table 71. Global III-V ICP Compound Semiconductor Etch System Revenue Forecast by Type (2026-2031) & ($ millions)
Table 72. Global III-V ICP Compound Semiconductor Etch System Sales Forecast by Application (2026-2031) & (K Units)
Table 73. Global III-V ICP Compound Semiconductor Etch System Revenue Forecast by Application (2026-2031) & ($ millions)
Table 74. Lam Research Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 75. Lam Research III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 76. Lam Research III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 77. Lam Research Main Business
Table 78. Lam Research Latest Developments
Table 79. Applied Materials Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 80. Applied Materials III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 81. Applied Materials III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 82. Applied Materials Main Business
Table 83. Applied Materials Latest Developments
Table 84. Hitachi High-tech Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 85. Hitachi High-tech III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 86. Hitachi High-tech III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 87. Hitachi High-tech Main Business
Table 88. Hitachi High-tech Latest Developments
Table 89. Tokyo Electron Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 90. Tokyo Electron III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 91. Tokyo Electron III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 92. Tokyo Electron Main Business
Table 93. Tokyo Electron Latest Developments
Table 94. Oxford Instruments Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 95. Oxford Instruments III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 96. Oxford Instruments III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 97. Oxford Instruments Main Business
Table 98. Oxford Instruments Latest Developments
Table 99. NAURA Technology Group Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 100. NAURA Technology Group III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 101. NAURA Technology Group III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 102. NAURA Technology Group Main Business
Table 103. NAURA Technology Group Latest Developments
Table 104. SPTS Technologies Ltd. Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 105. SPTS Technologies Ltd. III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 106. SPTS Technologies Ltd. III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 107. SPTS Technologies Ltd. Main Business
Table 108. SPTS Technologies Ltd. Latest Developments
Table 109. AMEC Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 110. AMEC III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 111. AMEC III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 112. AMEC Main Business
Table 113. AMEC Latest Developments
Table 114. Ulvac Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 115. Ulvac III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 116. Ulvac III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 117. Ulvac Main Business
Table 118. Ulvac Latest Developments
Table 119. Samco Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 120. Samco III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 121. Samco III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 122. Samco Main Business
Table 123. Samco Latest Developments
Table 124. Sentech Basic Information, III-V ICP Compound Semiconductor Etch System Manufacturing Base, Sales Area and Its Competitors
Table 125. Sentech III-V ICP Compound Semiconductor Etch System Product Portfolios and Specifications
Table 126. Sentech III-V ICP Compound Semiconductor Etch System Sales (K Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2020-2025)
Table 127. Sentech Main Business
Table 128. Sentech Latest Developments

LIST OF FIGURES

Figure 1. Picture of III-V ICP Compound Semiconductor Etch System
Figure 2. III-V ICP Compound Semiconductor Etch System Report Years Considered
Figure 3. Research Objectives
Figure 4. Research Methodology
Figure 5. Research Process and Data Source
Figure 6. Global III-V ICP Compound Semiconductor Etch System Sales Growth Rate 2020-2031 (K Units)
Figure 7. Global III-V ICP Compound Semiconductor Etch System Revenue Growth Rate 2020-2031 ($ millions)
Figure 8. III-V ICP Compound Semiconductor Etch System Sales by Geographic Region (2020, 2024 & 2031) & ($ millions)
Figure 9. III-V ICP Compound Semiconductor Etch System Sales Market Share by Country/Region (2024)
Figure 10. III-V ICP Compound Semiconductor Etch System Sales Market Share by Country/Region (2020, 2024 & 2031)
Figure 11. Product Picture of GaAs Etch System
Figure 12. Product Picture of InP Etch System
Figure 13. Product Picture of GaN Etch System
Figure 14. Product Picture of Others
Figure 15. Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Type in 2025
Figure 16. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Type (2020-2025)
Figure 17. III-V ICP Compound Semiconductor Etch System Consumed in Logic and Memory
Figure 18. Global III-V ICP Compound Semiconductor Etch System Market: Logic and Memory (2020-2025) & (K Units)
Figure 19. III-V ICP Compound Semiconductor Etch System Consumed in MEMS
Figure 20. Global III-V ICP Compound Semiconductor Etch System Market: MEMS (2020-2025) & (K Units)
Figure 21. III-V ICP Compound Semiconductor Etch System Consumed in Power Device
Figure 22. Global III-V ICP Compound Semiconductor Etch System Market: Power Device (2020-2025) & (K Units)
Figure 23. III-V ICP Compound Semiconductor Etch System Consumed in Others
Figure 24. Global III-V ICP Compound Semiconductor Etch System Market: Others (2020-2025) & (K Units)
Figure 25. Global III-V ICP Compound Semiconductor Etch System Sale Market Share by Application (2024)
Figure 26. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Application in 2025
Figure 27. III-V ICP Compound Semiconductor Etch System Sales by Company in 2025 (K Units)
Figure 28. Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Company in 2025
Figure 29. III-V ICP Compound Semiconductor Etch System Revenue by Company in 2025 ($ millions)
Figure 30. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Company in 2025
Figure 31. Global III-V ICP Compound Semiconductor Etch System Sales Market Share by Geographic Region (2020-2025)
Figure 32. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share by Geographic Region in 2025
Figure 33. Americas III-V ICP Compound Semiconductor Etch System Sales 2020-2025 (K Units)
Figure 34. Americas III-V ICP Compound Semiconductor Etch System Revenue 2020-2025 ($ millions)
Figure 35. APAC III-V ICP Compound Semiconductor Etch System Sales 2020-2025 (K Units)
Figure 36. APAC III-V ICP Compound Semiconductor Etch System Revenue 2020-2025 ($ millions)
Figure 37. Europe III-V ICP Compound Semiconductor Etch System Sales 2020-2025 (K Units)
Figure 38. Europe III-V ICP Compound Semiconductor Etch System Revenue 2020-2025 ($ millions)
Figure 39. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales 2020-2025 (K Units)
Figure 40. Middle East & Africa III-V ICP Compound Semiconductor Etch System Revenue 2020-2025 ($ millions)
Figure 41. Americas III-V ICP Compound Semiconductor Etch System Sales Market Share by Country in 2025
Figure 42. Americas III-V ICP Compound Semiconductor Etch System Revenue Market Share by Country (2020-2025)
Figure 43. Americas III-V ICP Compound Semiconductor Etch System Sales Market Share by Type (2020-2025)
Figure 44. Americas III-V ICP Compound Semiconductor Etch System Sales Market Share by Application (2020-2025)
Figure 45. United States III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 46. Canada III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 47. Mexico III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 48. Brazil III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 49. APAC III-V ICP Compound Semiconductor Etch System Sales Market Share by Region in 2025
Figure 50. APAC III-V ICP Compound Semiconductor Etch System Revenue Market Share by Region (2020-2025)
Figure 51. APAC III-V ICP Compound Semiconductor Etch System Sales Market Share by Type (2020-2025)
Figure 52. APAC III-V ICP Compound Semiconductor Etch System Sales Market Share by Application (2020-2025)
Figure 53. China III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 54. Japan III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 55. South Korea III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 56. Southeast Asia III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 57. India III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 58. Australia III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 59. China Taiwan III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 60. Europe III-V ICP Compound Semiconductor Etch System Sales Market Share by Country in 2025
Figure 61. Europe III-V ICP Compound Semiconductor Etch System Revenue Market Share by Country (2020-2025)
Figure 62. Europe III-V ICP Compound Semiconductor Etch System Sales Market Share by Type (2020-2025)
Figure 63. Europe III-V ICP Compound Semiconductor Etch System Sales Market Share by Application (2020-2025)
Figure 64. Germany III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 65. France III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 66. UK III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 67. Italy III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 68. Russia III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 69. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales Market Share by Country (2020-2025)
Figure 70. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales Market Share by Type (2020-2025)
Figure 71. Middle East & Africa III-V ICP Compound Semiconductor Etch System Sales Market Share by Application (2020-2025)
Figure 72. Egypt III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 73. South Africa III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 74. Israel III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 75. Turkey III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 76. GCC Countries III-V ICP Compound Semiconductor Etch System Revenue Growth 2020-2025 ($ millions)
Figure 77. Manufacturing Cost Structure Analysis of III-V ICP Compound Semiconductor Etch System in 2025
Figure 78. Manufacturing Process Analysis of III-V ICP Compound Semiconductor Etch System
Figure 79. Industry Chain Structure of III-V ICP Compound Semiconductor Etch System
Figure 80. Channels of Distribution
Figure 81. Global III-V ICP Compound Semiconductor Etch System Sales Market Forecast by Region (2026-2031)
Figure 82. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share Forecast by Region (2026-2031)
Figure 83. Global III-V ICP Compound Semiconductor Etch System Sales Market Share Forecast by Type (2026-2031)
Figure 84. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share Forecast by Type (2026-2031)
Figure 85. Global III-V ICP Compound Semiconductor Etch System Sales Market Share Forecast by Application (2026-2031)
Figure 86. Global III-V ICP Compound Semiconductor Etch System Revenue Market Share Forecast by Application (2026-2031)


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