Global Dry Etching Equipment Market Growth 2025-2031

May 2025 | 123 pages | ID: G056A5B02244EN
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The global FIB-SEM System market size is predicted to grow from US$ 644 million in 2025 to US$ 910 million in 2031; it is expected to grow at a CAGR of 5.9% from 2025 to 2031.

The FIB-SEM system is an electron microscope system that integrates focused electron beams and scanning ion beams. Focused ion beams can be used for micro processing of samples, scanning electron beams can be used for micro imaging and 'two-dimensional' characterization analysis of sample surface morphology, and real-time observation of the FIB processing process. Therefore, the FIB-SEM system can achieve fixed-point etching, deposition, cross-sectional cutting, TEM electron microscopy sample preparation, and micro/nano device preparation of samples Circuit repair, 3D structural characterization, etc.

Global key players of FIB-SEM System include Thermo Fisher Scientific Hitachi and Zeiss, etc. The top three players hold a share over 85%. Japan is the largest market. In terms of product type, Ga Ion Source is the largest segment, occupied for a share of 95%, and in terms of application, Material Science has a share about 40 percent.

Analysis of FIB-SEM system market drivers

1. Demand for semiconductor technology iteration

Advanced process node promotion:

3nm/2nm chip process requires atomic-level defect detection, and FIB-SEM supports nanoscale circuit editing and material composition analysis (such as EDS/EBSD integration) to help improve yield.

3D packaging technology (such as Chiplet) relies on FIB-SEM for through-silicon via (TSV) cross-sectional analysis and interface defect positioning.

Semiconductor material innovation:

The microstructure research of third-generation semiconductors (GaN, SiC) and two-dimensional materials (graphene) requires FIB-SEM to achieve atomic-level resolution imaging (<0.5nm).

2. Biomedical and life science research

Tissue engineering and drug delivery:

FIB-SEM supports cell-material interface imaging, analyzes the distribution of nanoparticles in the body, and accelerates targeted drug development.

Brain neuroscience: 3D reconstruction of the whole brain neural network is achieved through volume electron microscopy (SBEM), promoting the study of the mechanism of neurodegenerative diseases.

Implantable medical devices:

Analysis of nanoscale surface morphology of biocompatible materials (such as degradable stents) to optimize device design.

3. Breakthroughs in materials science

Research and development of new energy materials:

Study on the growth mechanism of lithium dendrites in solid-state batteries requires FIB-SEM combined with low-temperature in-situ electron microscopy technology.

Analysis of hydrogen embrittlement: Observation of metal microscopic crack propagation in transmission electron microscope samples prepared by FIB.

Design of nanocomposite materials:

FIB-SEM supports 3D structural characterization of multimodal materials (such as graphene/metal composites) to help optimize performance.

4. Industry 4.0 and smart manufacturing

Micro-nano manufacturing upgrade:

The complex structure processing of MEMS sensors (such as inertial measurement units) relies on the ion beam direct writing technology of FIB-SEM.

Nanoscale circuit repair of flexible electronics (such as foldable screens) drives the growth of equipment demand.

Intelligent quality control:

AI integrated FIB-SEM system realizes automated defect detection (such as wafer surface particle analysis) to improve production line efficiency.

5. Academic and policy support

Research funding:

Global nanotechnology R&D investment increased by 8% annually (NSF data), and universities/national laboratories purchased FIB-SEM for cutting-edge exploration.

China's '14th Five-Year Plan' focuses on supporting the localization of electron microscopes, giving rise to local equipment demand.

Open source science trends:

FIB-SEM data sharing platforms (such as EMPIAR) promote interdisciplinary cooperation and accelerate technology popularization.

6. Technology integration and innovation

Multimodal combined technology:

FIB-SEM is integrated with Raman spectroscopy/AFM to achieve morphology-composition-mechanics multi-attribute correlation analysis.

In-situ electrical testing: Directly measure carrier transport characteristics on FIB-prepared nanostructures.

AI-assisted analysis:

Deep learning algorithms increase FIB-SEM imaging speed by 3-5 times and reduce the operating threshold.

Market growth forecast and competition focus.

Decisive factors:

Resolution and processing accuracy: Breakthrough to sub-nanometer level (<0.3nm) to support quantum material research.

Automation and data ecology: Develop AI-driven full-process solutions (such as sample preparation-imaging-analysis integration).

Summary: The three core driving forces of semiconductor technology generational evolution, biomedical interdisciplinary integration, and material science paradigm innovation, coupled with policy support and AI technology empowerment, promote FIB-SEM from a scientific research tool to an industrial standard. Chinese companies need to break through the bottlenecks of ion source stability and software algorithms to seize the high-end market.

LP Information, Inc. (LPI) ' newest research report, the “FIB-SEM System Industry Forecast” looks at past sales and reviews total world FIB-SEM System sales in 2024, providing a comprehensive analysis by region and market sector of projected FIB-SEM System sales for 2025 through 2031. With FIB-SEM System sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world FIB-SEM System industry.

This Insight Report provides a comprehensive analysis of the global FIB-SEM System landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on FIB-SEM System portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global FIB-SEM System market.

This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for FIB-SEM System and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global FIB-SEM System.

This report presents a comprehensive overview, market shares, and growth opportunities of FIB-SEM System market by product type, application, key manufacturers and key regions and countries.

Segmentation by Type:
  • Ga Ion Source
  • Non-Ga Ion Source
Segmentation by Application:
  • Material Science
  • Life Sciences
  • Semiconductor
This report also splits the market by region:
  • Americas
    • United States
    • Canada
    • Mexico
    • Brazil
  • APAC
    • China
    • Japan
    • Korea
    • Southeast Asia
    • India
    • Australia
  • Europe
    • Germany
    • France
    • UK
    • Italy
    • Russia
  • Middle East & Africa
    • Egypt
    • South Africa
    • Israel
    • Turkey
    • GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
  • Thermo Fisher Scientific
  • Hitachi
  • Zeiss
  • JEOL Ltd
  • Tescan Group
  • Raith
Key Questions Addressed in this Report

What is the 10-year outlook for the global FIB-SEM System market?

What factors are driving FIB-SEM System market growth, globally and by region?

Which technologies are poised for the fastest growth by market and region?

How do FIB-SEM System market opportunities vary by end market size?

How does FIB-SEM System break out by Type, by Application?
1 SCOPE OF THE REPORT

1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats

2 EXECUTIVE SUMMARY

2.1 World Market Overview
  2.1.1 Global Dry Etching Equipment Annual Sales 2020-2031
  2.1.2 World Current & Future Analysis for Dry Etching Equipment by Geographic Region, 2020, 2024 & 2031
  2.1.3 World Current & Future Analysis for Dry Etching Equipment by Country/Region, 2020, 2024 & 2031
2.2 Dry Etching Equipment Segment by Type
  2.2.1 Inductively Coupled Plasma (ICP)
  2.2.2 Capacitive Coupled Plasma (CCP)
  2.2.3 Reactive Ion Etching (RIE)
  2.2.4 Deep Reactive Ion Etching (DRIE)
  2.2.5 Others
2.3 Dry Etching Equipment Sales by Type
  2.3.1 Global Dry Etching Equipment Sales Market Share by Type (2020-2025)
  2.3.2 Global Dry Etching Equipment Revenue and Market Share by Type (2020-2025)
  2.3.3 Global Dry Etching Equipment Sale Price by Type (2020-2025)
2.4 Dry Etching Equipment Segment by Application
  2.4.1 Logic and Memory
  2.4.2 MEMS
  2.4.3 Power Device
  2.4.4 Others
2.5 Dry Etching Equipment Sales by Application
  2.5.1 Global Dry Etching Equipment Sale Market Share by Application (2020-2025)
  2.5.2 Global Dry Etching Equipment Revenue and Market Share by Application (2020-2025)
  2.5.3 Global Dry Etching Equipment Sale Price by Application (2020-2025)

3 GLOBAL BY COMPANY

3.1 Global Dry Etching Equipment Breakdown Data by Company
  3.1.1 Global Dry Etching Equipment Annual Sales by Company (2020-2025)
  3.1.2 Global Dry Etching Equipment Sales Market Share by Company (2020-2025)
3.2 Global Dry Etching Equipment Annual Revenue by Company (2020-2025)
  3.2.1 Global Dry Etching Equipment Revenue by Company (2020-2025)
  3.2.2 Global Dry Etching Equipment Revenue Market Share by Company (2020-2025)
3.3 Global Dry Etching Equipment Sale Price by Company
3.4 Key Manufacturers Dry Etching Equipment Producing Area Distribution, Sales Area, Product Type
  3.4.1 Key Manufacturers Dry Etching Equipment Product Location Distribution
  3.4.2 Players Dry Etching Equipment Products Offered
3.5 Market Concentration Rate Analysis
  3.5.1 Competition Landscape Analysis
  3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2023-2025)
3.6 New Products and Potential Entrants
3.7 Market M&A Activity & Strategy

4 WORLD HISTORIC REVIEW FOR DRY ETCHING EQUIPMENT BY GEOGRAPHIC REGION

4.1 World Historic Dry Etching Equipment Market Size by Geographic Region (2020-2025)
  4.1.1 Global Dry Etching Equipment Annual Sales by Geographic Region (2020-2025)
  4.1.2 Global Dry Etching Equipment Annual Revenue by Geographic Region (2020-2025)
4.2 World Historic Dry Etching Equipment Market Size by Country/Region (2020-2025)
  4.2.1 Global Dry Etching Equipment Annual Sales by Country/Region (2020-2025)
  4.2.2 Global Dry Etching Equipment Annual Revenue by Country/Region (2020-2025)
4.3 Americas Dry Etching Equipment Sales Growth
4.4 APAC Dry Etching Equipment Sales Growth
4.5 Europe Dry Etching Equipment Sales Growth
4.6 Middle East & Africa Dry Etching Equipment Sales Growth

5 AMERICAS

5.1 Americas Dry Etching Equipment Sales by Country
  5.1.1 Americas Dry Etching Equipment Sales by Country (2020-2025)
  5.1.2 Americas Dry Etching Equipment Revenue by Country (2020-2025)
5.2 Americas Dry Etching Equipment Sales by Type (2020-2025)
5.3 Americas Dry Etching Equipment Sales by Application (2020-2025)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil

6 APAC

6.1 APAC Dry Etching Equipment Sales by Region
  6.1.1 APAC Dry Etching Equipment Sales by Region (2020-2025)
  6.1.2 APAC Dry Etching Equipment Revenue by Region (2020-2025)
6.2 APAC Dry Etching Equipment Sales by Type (2020-2025)
6.3 APAC Dry Etching Equipment Sales by Application (2020-2025)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan

7 EUROPE

7.1 Europe Dry Etching Equipment by Country
  7.1.1 Europe Dry Etching Equipment Sales by Country (2020-2025)
  7.1.2 Europe Dry Etching Equipment Revenue by Country (2020-2025)
7.2 Europe Dry Etching Equipment Sales by Type (2020-2025)
7.3 Europe Dry Etching Equipment Sales by Application (2020-2025)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia

8 MIDDLE EAST & AFRICA

8.1 Middle East & Africa Dry Etching Equipment by Country
  8.1.1 Middle East & Africa Dry Etching Equipment Sales by Country (2020-2025)
  8.1.2 Middle East & Africa Dry Etching Equipment Revenue by Country (2020-2025)
8.2 Middle East & Africa Dry Etching Equipment Sales by Type (2020-2025)
8.3 Middle East & Africa Dry Etching Equipment Sales by Application (2020-2025)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries

9 MARKET DRIVERS, CHALLENGES AND TRENDS

9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends

10 MANUFACTURING COST STRUCTURE ANALYSIS

10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of Dry Etching Equipment
10.3 Manufacturing Process Analysis of Dry Etching Equipment
10.4 Industry Chain Structure of Dry Etching Equipment

11 MARKETING, DISTRIBUTORS AND CUSTOMER

11.1 Sales Channel
  11.1.1 Direct Channels
  11.1.2 Indirect Channels
11.2 Dry Etching Equipment Distributors
11.3 Dry Etching Equipment Customer

12 WORLD FORECAST REVIEW FOR DRY ETCHING EQUIPMENT BY GEOGRAPHIC REGION

12.1 Global Dry Etching Equipment Market Size Forecast by Region
  12.1.1 Global Dry Etching Equipment Forecast by Region (2026-2031)
  12.1.2 Global Dry Etching Equipment Annual Revenue Forecast by Region (2026-2031)
12.2 Americas Forecast by Country (2026-2031)
12.3 APAC Forecast by Region (2026-2031)
12.4 Europe Forecast by Country (2026-2031)
12.5 Middle East & Africa Forecast by Country (2026-2031)
12.6 Global Dry Etching Equipment Forecast by Type (2026-2031)
12.7 Global Dry Etching Equipment Forecast by Application (2026-2031)

13 KEY PLAYERS ANALYSIS

13.1 Lam Research
  13.1.1 Lam Research Company Information
  13.1.2 Lam Research Dry Etching Equipment Product Portfolios and Specifications
  13.1.3 Lam Research Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.1.4 Lam Research Main Business Overview
  13.1.5 Lam Research Latest Developments
13.2 TEL
  13.2.1 TEL Company Information
  13.2.2 TEL Dry Etching Equipment Product Portfolios and Specifications
  13.2.3 TEL Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.2.4 TEL Main Business Overview
  13.2.5 TEL Latest Developments
13.3 Applied Materials
  13.3.1 Applied Materials Company Information
  13.3.2 Applied Materials Dry Etching Equipment Product Portfolios and Specifications
  13.3.3 Applied Materials Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.3.4 Applied Materials Main Business Overview
  13.3.5 Applied Materials Latest Developments
13.4 Hitachi High-Technologies
  13.4.1 Hitachi High-Technologies Company Information
  13.4.2 Hitachi High-Technologies Dry Etching Equipment Product Portfolios and Specifications
  13.4.3 Hitachi High-Technologies Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.4.4 Hitachi High-Technologies Main Business Overview
  13.4.5 Hitachi High-Technologies Latest Developments
13.5 Oxford Instruments
  13.5.1 Oxford Instruments Company Information
  13.5.2 Oxford Instruments Dry Etching Equipment Product Portfolios and Specifications
  13.5.3 Oxford Instruments Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.5.4 Oxford Instruments Main Business Overview
  13.5.5 Oxford Instruments Latest Developments
13.6 ULVAC
  13.6.1 ULVAC Company Information
  13.6.2 ULVAC Dry Etching Equipment Product Portfolios and Specifications
  13.6.3 ULVAC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.6.4 ULVAC Main Business Overview
  13.6.5 ULVAC Latest Developments
13.7 SPTS Technologies
  13.7.1 SPTS Technologies Company Information
  13.7.2 SPTS Technologies Dry Etching Equipment Product Portfolios and Specifications
  13.7.3 SPTS Technologies Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.7.4 SPTS Technologies Main Business Overview
  13.7.5 SPTS Technologies Latest Developments
13.8 GigaLane
  13.8.1 GigaLane Company Information
  13.8.2 GigaLane Dry Etching Equipment Product Portfolios and Specifications
  13.8.3 GigaLane Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.8.4 GigaLane Main Business Overview
  13.8.5 GigaLane Latest Developments
13.9 Plasma-Therm
  13.9.1 Plasma-Therm Company Information
  13.9.2 Plasma-Therm Dry Etching Equipment Product Portfolios and Specifications
  13.9.3 Plasma-Therm Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.9.4 Plasma-Therm Main Business Overview
  13.9.5 Plasma-Therm Latest Developments
13.10 SAMCO
  13.10.1 SAMCO Company Information
  13.10.2 SAMCO Dry Etching Equipment Product Portfolios and Specifications
  13.10.3 SAMCO Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.10.4 SAMCO Main Business Overview
  13.10.5 SAMCO Latest Developments
13.11 AMEC
  13.11.1 AMEC Company Information
  13.11.2 AMEC Dry Etching Equipment Product Portfolios and Specifications
  13.11.3 AMEC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.11.4 AMEC Main Business Overview
  13.11.5 AMEC Latest Developments
13.12 NAURA
  13.12.1 NAURA Company Information
  13.12.2 NAURA Dry Etching Equipment Product Portfolios and Specifications
  13.12.3 NAURA Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  13.12.4 NAURA Main Business Overview
  13.12.5 NAURA Latest Developments

14 RESEARCH FINDINGS AND CONCLUSION


LIST OF TABLES

Table 1. Dry Etching Equipment Annual Sales CAGR by Geographic Region (2020, 2024 & 2031) & ($ millions)
Table 2. Dry Etching Equipment Annual Sales CAGR by Country/Region (2020, 2024 & 2031) & ($ millions)
Table 3. Major Players of Inductively Coupled Plasma (ICP)
Table 4. Major Players of Capacitive Coupled Plasma (CCP)
Table 5. Major Players of Reactive Ion Etching (RIE)
Table 6. Major Players of Deep Reactive Ion Etching (DRIE)
Table 7. Major Players of Others
Table 8. Global Dry Etching Equipment Sales by Type (2020-2025) & (Units)
Table 9. Global Dry Etching Equipment Sales Market Share by Type (2020-2025)
Table 10. Global Dry Etching Equipment Revenue by Type (2020-2025) & ($ million)
Table 11. Global Dry Etching Equipment Revenue Market Share by Type (2020-2025)
Table 12. Global Dry Etching Equipment Sale Price by Type (2020-2025) & (K USD/Unit)
Table 13. Global Dry Etching Equipment Sale by Application (2020-2025) & (Units)
Table 14. Global Dry Etching Equipment Sale Market Share by Application (2020-2025)
Table 15. Global Dry Etching Equipment Revenue by Application (2020-2025) & ($ million)
Table 16. Global Dry Etching Equipment Revenue Market Share by Application (2020-2025)
Table 17. Global Dry Etching Equipment Sale Price by Application (2020-2025) & (K USD/Unit)
Table 18. Global Dry Etching Equipment Sales by Company (2020-2025) & (Units)
Table 19. Global Dry Etching Equipment Sales Market Share by Company (2020-2025)
Table 20. Global Dry Etching Equipment Revenue by Company (2020-2025) & ($ millions)
Table 21. Global Dry Etching Equipment Revenue Market Share by Company (2020-2025)
Table 22. Global Dry Etching Equipment Sale Price by Company (2020-2025) & (K USD/Unit)
Table 23. Key Manufacturers Dry Etching Equipment Producing Area Distribution and Sales Area
Table 24. Players Dry Etching Equipment Products Offered
Table 25. Dry Etching Equipment Concentration Ratio (CR3, CR5 and CR10) & (2023-2025)
Table 26. New Products and Potential Entrants
Table 27. Market M&A Activity & Strategy
Table 28. Global Dry Etching Equipment Sales by Geographic Region (2020-2025) & (Units)
Table 29. Global Dry Etching Equipment Sales Market Share Geographic Region (2020-2025)
Table 30. Global Dry Etching Equipment Revenue by Geographic Region (2020-2025) & ($ millions)
Table 31. Global Dry Etching Equipment Revenue Market Share by Geographic Region (2020-2025)
Table 32. Global Dry Etching Equipment Sales by Country/Region (2020-2025) & (Units)
Table 33. Global Dry Etching Equipment Sales Market Share by Country/Region (2020-2025)
Table 34. Global Dry Etching Equipment Revenue by Country/Region (2020-2025) & ($ millions)
Table 35. Global Dry Etching Equipment Revenue Market Share by Country/Region (2020-2025)
Table 36. Americas Dry Etching Equipment Sales by Country (2020-2025) & (Units)
Table 37. Americas Dry Etching Equipment Sales Market Share by Country (2020-2025)
Table 38. Americas Dry Etching Equipment Revenue by Country (2020-2025) & ($ millions)
Table 39. Americas Dry Etching Equipment Sales by Type (2020-2025) & (Units)
Table 40. Americas Dry Etching Equipment Sales by Application (2020-2025) & (Units)
Table 41. APAC Dry Etching Equipment Sales by Region (2020-2025) & (Units)
Table 42. APAC Dry Etching Equipment Sales Market Share by Region (2020-2025)
Table 43. APAC Dry Etching Equipment Revenue by Region (2020-2025) & ($ millions)
Table 44. APAC Dry Etching Equipment Sales by Type (2020-2025) & (Units)
Table 45. APAC Dry Etching Equipment Sales by Application (2020-2025) & (Units)
Table 46. Europe Dry Etching Equipment Sales by Country (2020-2025) & (Units)
Table 47. Europe Dry Etching Equipment Revenue by Country (2020-2025) & ($ millions)
Table 48. Europe Dry Etching Equipment Sales by Type (2020-2025) & (Units)
Table 49. Europe Dry Etching Equipment Sales by Application (2020-2025) & (Units)
Table 50. Middle East & Africa Dry Etching Equipment Sales by Country (2020-2025) & (Units)
Table 51. Middle East & Africa Dry Etching Equipment Revenue Market Share by Country (2020-2025)
Table 52. Middle East & Africa Dry Etching Equipment Sales by Type (2020-2025) & (Units)
Table 53. Middle East & Africa Dry Etching Equipment Sales by Application (2020-2025) & (Units)
Table 54. Key Market Drivers & Growth Opportunities of Dry Etching Equipment
Table 55. Key Market Challenges & Risks of Dry Etching Equipment
Table 56. Key Industry Trends of Dry Etching Equipment
Table 57. Dry Etching Equipment Raw Material
Table 58. Key Suppliers of Raw Materials
Table 59. Dry Etching Equipment Distributors List
Table 60. Dry Etching Equipment Customer List
Table 61. Global Dry Etching Equipment Sales Forecast by Region (2026-2031) & (Units)
Table 62. Global Dry Etching Equipment Revenue Forecast by Region (2026-2031) & ($ millions)
Table 63. Americas Dry Etching Equipment Sales Forecast by Country (2026-2031) & (Units)
Table 64. Americas Dry Etching Equipment Annual Revenue Forecast by Country (2026-2031) & ($ millions)
Table 65. APAC Dry Etching Equipment Sales Forecast by Region (2026-2031) & (Units)
Table 66. APAC Dry Etching Equipment Annual Revenue Forecast by Region (2026-2031) & ($ millions)
Table 67. Europe Dry Etching Equipment Sales Forecast by Country (2026-2031) & (Units)
Table 68. Europe Dry Etching Equipment Revenue Forecast by Country (2026-2031) & ($ millions)
Table 69. Middle East & Africa Dry Etching Equipment Sales Forecast by Country (2026-2031) & (Units)
Table 70. Middle East & Africa Dry Etching Equipment Revenue Forecast by Country (2026-2031) & ($ millions)
Table 71. Global Dry Etching Equipment Sales Forecast by Type (2026-2031) & (Units)
Table 72. Global Dry Etching Equipment Revenue Forecast by Type (2026-2031) & ($ millions)
Table 73. Global Dry Etching Equipment Sales Forecast by Application (2026-2031) & (Units)
Table 74. Global Dry Etching Equipment Revenue Forecast by Application (2026-2031) & ($ millions)
Table 75. Lam Research Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 76. Lam Research Dry Etching Equipment Product Portfolios and Specifications
Table 77. Lam Research Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 78. Lam Research Main Business
Table 79. Lam Research Latest Developments
Table 80. TEL Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 81. TEL Dry Etching Equipment Product Portfolios and Specifications
Table 82. TEL Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 83. TEL Main Business
Table 84. TEL Latest Developments
Table 85. Applied Materials Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 86. Applied Materials Dry Etching Equipment Product Portfolios and Specifications
Table 87. Applied Materials Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 88. Applied Materials Main Business
Table 89. Applied Materials Latest Developments
Table 90. Hitachi High-Technologies Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 91. Hitachi High-Technologies Dry Etching Equipment Product Portfolios and Specifications
Table 92. Hitachi High-Technologies Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 93. Hitachi High-Technologies Main Business
Table 94. Hitachi High-Technologies Latest Developments
Table 95. Oxford Instruments Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 96. Oxford Instruments Dry Etching Equipment Product Portfolios and Specifications
Table 97. Oxford Instruments Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 98. Oxford Instruments Main Business
Table 99. Oxford Instruments Latest Developments
Table 100. ULVAC Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 101. ULVAC Dry Etching Equipment Product Portfolios and Specifications
Table 102. ULVAC Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 103. ULVAC Main Business
Table 104. ULVAC Latest Developments
Table 105. SPTS Technologies Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 106. SPTS Technologies Dry Etching Equipment Product Portfolios and Specifications
Table 107. SPTS Technologies Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 108. SPTS Technologies Main Business
Table 109. SPTS Technologies Latest Developments
Table 110. GigaLane Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 111. GigaLane Dry Etching Equipment Product Portfolios and Specifications
Table 112. GigaLane Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 113. GigaLane Main Business
Table 114. GigaLane Latest Developments
Table 115. Plasma-Therm Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 116. Plasma-Therm Dry Etching Equipment Product Portfolios and Specifications
Table 117. Plasma-Therm Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 118. Plasma-Therm Main Business
Table 119. Plasma-Therm Latest Developments
Table 120. SAMCO Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 121. SAMCO Dry Etching Equipment Product Portfolios and Specifications
Table 122. SAMCO Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 123. SAMCO Main Business
Table 124. SAMCO Latest Developments
Table 125. AMEC Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 126. AMEC Dry Etching Equipment Product Portfolios and Specifications
Table 127. AMEC Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 128. AMEC Main Business
Table 129. AMEC Latest Developments
Table 130. NAURA Basic Information, Dry Etching Equipment Manufacturing Base, Sales Area and Its Competitors
Table 131. NAURA Dry Etching Equipment Product Portfolios and Specifications
Table 132. NAURA Dry Etching Equipment Sales (Units), Revenue ($ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
Table 133. NAURA Main Business
Table 134. NAURA Latest Developments



LIST OF FIGURES

Figure 1. Picture of Dry Etching Equipment
Figure 2. Dry Etching Equipment Report Years Considered
Figure 3. Research Objectives
Figure 4. Research Methodology
Figure 5. Research Process and Data Source
Figure 6. Global Dry Etching Equipment Sales Growth Rate 2020-2031 (Units)
Figure 7. Global Dry Etching Equipment Revenue Growth Rate 2020-2031 ($ millions)
Figure 8. Dry Etching Equipment Sales by Geographic Region (2020, 2024 & 2031) & ($ millions)
Figure 9. Dry Etching Equipment Sales Market Share by Country/Region (2024)
Figure 10. Dry Etching Equipment Sales Market Share by Country/Region (2020, 2024 & 2031)
Figure 11. Product Picture of Inductively Coupled Plasma (ICP)
Figure 12. Product Picture of Capacitive Coupled Plasma (CCP)
Figure 13. Product Picture of Reactive Ion Etching (RIE)
Figure 14. Product Picture of Deep Reactive Ion Etching (DRIE)
Figure 15. Product Picture of Others
Figure 16. Global Dry Etching Equipment Sales Market Share by Type in 2025
Figure 17. Global Dry Etching Equipment Revenue Market Share by Type (2020-2025)
Figure 18. Dry Etching Equipment Consumed in Logic and Memory
Figure 19. Global Dry Etching Equipment Market: Logic and Memory (2020-2025) & (Units)
Figure 20. Dry Etching Equipment Consumed in MEMS
Figure 21. Global Dry Etching Equipment Market: MEMS (2020-2025) & (Units)
Figure 22. Dry Etching Equipment Consumed in Power Device
Figure 23. Global Dry Etching Equipment Market: Power Device (2020-2025) & (Units)
Figure 24. Dry Etching Equipment Consumed in Others
Figure 25. Global Dry Etching Equipment Market: Others (2020-2025) & (Units)
Figure 26. Global Dry Etching Equipment Sale Market Share by Application (2024)
Figure 27. Global Dry Etching Equipment Revenue Market Share by Application in 2025
Figure 28. Dry Etching Equipment Sales by Company in 2025 (Units)
Figure 29. Global Dry Etching Equipment Sales Market Share by Company in 2025
Figure 30. Dry Etching Equipment Revenue by Company in 2025 ($ millions)
Figure 31. Global Dry Etching Equipment Revenue Market Share by Company in 2025
Figure 32. Global Dry Etching Equipment Sales Market Share by Geographic Region (2020-2025)
Figure 33. Global Dry Etching Equipment Revenue Market Share by Geographic Region in 2025
Figure 34. Americas Dry Etching Equipment Sales 2020-2025 (Units)
Figure 35. Americas Dry Etching Equipment Revenue 2020-2025 ($ millions)
Figure 36. APAC Dry Etching Equipment Sales 2020-2025 (Units)
Figure 37. APAC Dry Etching Equipment Revenue 2020-2025 ($ millions)
Figure 38. Europe Dry Etching Equipment Sales 2020-2025 (Units)
Figure 39. Europe Dry Etching Equipment Revenue 2020-2025 ($ millions)
Figure 40. Middle East & Africa Dry Etching Equipment Sales 2020-2025 (Units)
Figure 41. Middle East & Africa Dry Etching Equipment Revenue 2020-2025 ($ millions)
Figure 42. Americas Dry Etching Equipment Sales Market Share by Country in 2025
Figure 43. Americas Dry Etching Equipment Revenue Market Share by Country (2020-2025)
Figure 44. Americas Dry Etching Equipment Sales Market Share by Type (2020-2025)
Figure 45. Americas Dry Etching Equipment Sales Market Share by Application (2020-2025)
Figure 46. United States Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 47. Canada Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 48. Mexico Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 49. Brazil Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 50. APAC Dry Etching Equipment Sales Market Share by Region in 2025
Figure 51. APAC Dry Etching Equipment Revenue Market Share by Region (2020-2025)
Figure 52. APAC Dry Etching Equipment Sales Market Share by Type (2020-2025)
Figure 53. APAC Dry Etching Equipment Sales Market Share by Application (2020-2025)
Figure 54. China Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 55. Japan Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 56. South Korea Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 57. Southeast Asia Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 58. India Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 59. Australia Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 60. China Taiwan Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 61. Europe Dry Etching Equipment Sales Market Share by Country in 2025
Figure 62. Europe Dry Etching Equipment Revenue Market Share by Country (2020-2025)
Figure 63. Europe Dry Etching Equipment Sales Market Share by Type (2020-2025)
Figure 64. Europe Dry Etching Equipment Sales Market Share by Application (2020-2025)
Figure 65. Germany Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 66. France Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 67. UK Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 68. Italy Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 69. Russia Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 70. Middle East & Africa Dry Etching Equipment Sales Market Share by Country (2020-2025)
Figure 71. Middle East & Africa Dry Etching Equipment Sales Market Share by Type (2020-2025)
Figure 72. Middle East & Africa Dry Etching Equipment Sales Market Share by Application (2020-2025)
Figure 73. Egypt Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 74. South Africa Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 75. Israel Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 76. Turkey Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 77. GCC Countries Dry Etching Equipment Revenue Growth 2020-2025 ($ millions)
Figure 78. Manufacturing Cost Structure Analysis of Dry Etching Equipment in 2025
Figure 79. Manufacturing Process Analysis of Dry Etching Equipment
Figure 80. Industry Chain Structure of Dry Etching Equipment
Figure 81. Channels of Distribution
Figure 82. Global Dry Etching Equipment Sales Market Forecast by Region (2026-2031)
Figure 83. Global Dry Etching Equipment Revenue Market Share Forecast by Region (2026-2031)
Figure 84. Global Dry Etching Equipment Sales Market Share Forecast by Type (2026-2031)
Figure 85. Global Dry Etching Equipment Revenue Market Share Forecast by Type (2026-2031)
Figure 86. Global Dry Etching Equipment Sales Market Share Forecast by Application (2026-2031)
Figure 87. Global Dry Etching Equipment Revenue Market Share Forecast by Application (2026-2031)