Global Dry Etching Equipment for Semiconductor Market Growth 2026-2032

September 2026 | 106 pages | ID: GEC135595B44EN
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The global Dry Etching Equipment for Semiconductor market size is predicted to grow from US$ 21510 million in 2025 to US$ 35590 million in 2032; it is expected to grow at a CAGR of 7.6% from 2026 to 2032.

Dry etching equipment is a type of semiconductor manufacturing tool used to remove material from a wafer surface using plasma or reactive gases, rather than liquid chemicals. This process enables precise pattern transfer with high anisotropy, critical for advanced semiconductor fabrication. Common techniques include reactive ion etching (RIE), inductively coupled plasma (ICP) etching, and deep reactive ion etching (DRIE). Dry etching systems are essential for producing microelectronic devices with fine features, such as logic chips, memory, and MEMS structures, offering superior control, selectivity, and uniformity compared to wet etching methods.

The semiconductor dry etching equipment market is primarily driven by the continuous advancement of advanced-node chips and the widespread adoption of emerging technologies. The rapid development of 5G, artificial intelligence (AI), high-performance computing (HPC), and the Internet of Things (IoT) has increased demand for higher precision and smaller feature sizes, pushing dry etching technology toward finer and more controllable processes. Additionally, the semiconductor industry's stringent requirements for production capacity and yield, along with the rise of 3D NAND, advanced logic chips, and third-generation semiconductors (e.g., SiC/GaN), further stimulate market demand for dry etching equipment.

The dry etching equipment market currently exhibits three major trends: First, increasing process precision, as the adoption of extreme ultraviolet (EUV) lithography drives etching processes toward higher accuracy. Second, equipment intelligence, with AI and big data analytics being integrated to optimize etching processes, improving stability and production efficiency. Third, application diversification, as dry etching expands beyond traditional silicon-based semiconductors into advanced packaging, MEMS, and power devices. Furthermore, the localization trend in the global semiconductor supply chain is accelerating domestic R&D and production capacity expansion for etching equipment in regions like China and South Korea.

LP Information, Inc. (LPI) ' newest research report, the “Dry Etching Equipment for Semiconductor Industry Forecast” looks at past sales and reviews total world Dry Etching Equipment for Semiconductor sales in 2025, providing a comprehensive analysis by region and market sector of projected Dry Etching Equipment for Semiconductor sales for 2026 through 2032. With Dry Etching Equipment for Semiconductor sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Dry Etching Equipment for Semiconductor industry.

This Insight Report provides a comprehensive analysis of the global Dry Etching Equipment for Semiconductor landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Dry Etching Equipment for Semiconductor portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Dry Etching Equipment for Semiconductor market.

This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Dry Etching Equipment for Semiconductor and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Dry Etching Equipment for Semiconductor.

This report presents a comprehensive overview, market shares, and growth opportunities of Dry Etching Equipment for Semiconductor market by product type, application, key manufacturers and key regions and countries.

Segmentation by Type:

  • Inductively Coupled Plasma (ICP)
  • Capacitive Coupled Plasma (CCP)
  • Reactive Ion Etching (RIE)
  • Deep Reactive Ion Etching (DRIE)
  • Others

Segmentation by Application:

  • Logic and Memory
  • Power Device
  • MEMS
  • Others

This report also splits the market by region:

  • Americas
    • United States
    • Canada
    • Mexico
    • Brazil
  • APAC
    • China
    • Japan
    • Korea
    • Southeast Asia
    • India
    • Australia
  • Europe
    • Germany
    • France
    • UK
    • Italy
    • Russia
  • Middle East & Africa
    • Egypt
    • South Africa
    • Israel
    • Turkey
    • GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
  • Lam Research
  • Tokyo Electron Limited
  • Applied Materials
  • Hitachi High-Tech
  • SEMES
  • AMEC
  • NAURA
  • SPTS Technologies (KLA)
  • Oxford Instruments
  • ULVAC
  • Plasma-Therm
  • GigaLane
  • VM
  • Jusung Engineering
  • SAMCO

Key Questions Addressed in this Report

  • What is the 10-year outlook for the global Dry Etching Equipment for Semiconductor market?
  • What factors are driving Dry Etching Equipment for Semiconductor market growth, globally and by region?
  • Which technologies are poised for the fastest growth by market and region?
  • How do Dry Etching Equipment for Semiconductor market opportunities vary by end market size?
  • How does Dry Etching Equipment for Semiconductor break out by Type, by Application?
1 SCOPE OF THE REPORT

1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats

2 EXECUTIVE SUMMARY

2.1 World Market Overview
  2.1.1 Global Dry Etching Equipment for Semiconductor Annual Sales 2021-2032
  2.1.2 World Current & Future Analysis for Dry Etching Equipment for Semiconductor by Geographic Region, 2021, 2025 & 2032
  2.1.3 World Current & Future Analysis for Dry Etching Equipment for Semiconductor by Country/Region, 2021, 2025 & 2032
2.2 Dry Etching Equipment for Semiconductor Segment by Type
  2.2.1 Inductively Coupled Plasma (ICP)
  2.2.2 Capacitive Coupled Plasma (CCP)
  2.2.3 Reactive Ion Etching (RIE)
  2.2.4 Deep Reactive Ion Etching (DRIE)
  2.2.5 Others
  2.2.6 Dry Etching Equipment for Semiconductor Sales by Type
    2.2.6.1 Global Dry Etching Equipment for Semiconductor Sales Market Share by Type (2021-2026)
    2.2.6.2 Global Dry Etching Equipment for Semiconductor Revenue and Market Share by Type (2021-2026)
    2.2.6.3 Global Dry Etching Equipment for Semiconductor Sale Price by Type (2021-2026)
2.3 Dry Etching Equipment for Semiconductor Segment by Application
  2.3.1 Logic and Memory
  2.3.2 Power Device
  2.3.3 MEMS
  2.3.4 Others
  2.3.5 Dry Etching Equipment for Semiconductor Sales by Application
    2.3.5.1 Global Dry Etching Equipment for Semiconductor Sale Market Share by Application (2021-2026)
    2.3.5.2 Global Dry Etching Equipment for Semiconductor Revenue and Market Share by Application (2021-2026)
    2.3.5.3 Global Dry Etching Equipment for Semiconductor Sale Price by Application (2021-2026)

3 GLOBAL BY COMPANY

3.1 Global Dry Etching Equipment for Semiconductor Breakdown Data by Company
  3.1.1 Global Dry Etching Equipment for Semiconductor Annual Sales by Company (2021-2026)
  3.1.2 Global Dry Etching Equipment for Semiconductor Sales Market Share by Company (2021-2026)
3.2 Global Dry Etching Equipment for Semiconductor Annual Revenue by Company (2021-2026)
  3.2.1 Global Dry Etching Equipment for Semiconductor Revenue by Company (2021-2026)
  3.2.2 Global Dry Etching Equipment for Semiconductor Revenue Market Share by Company (2021-2026)
3.3 Global Dry Etching Equipment for Semiconductor Sale Price by Company
3.4 Key Manufacturers Dry Etching Equipment for Semiconductor Producing Area Distribution, Sales Area, Product Type
  3.4.1 Key Manufacturers Dry Etching Equipment for Semiconductor Product Location Distribution
  3.4.2 Players Dry Etching Equipment for Semiconductor Products Offered
3.5 Market Concentration Rate Analysis
  3.5.1 Competition Landscape Analysis
  3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2024-2026)
3.6 New Products and Potential Entrants
3.7 Market M&A Activity & Strategy

4 WORLD HISTORIC REVIEW FOR DRY ETCHING EQUIPMENT FOR SEMICONDUCTOR BY GEOGRAPHIC REGION

4.1 World Historic Dry Etching Equipment for Semiconductor Market Size by Geographic Region (2021-2026)
  4.1.1 Global Dry Etching Equipment for Semiconductor Annual Sales by Geographic Region (2021-2026)
  4.1.2 Global Dry Etching Equipment for Semiconductor Annual Revenue by Geographic Region (2021-2026)
4.2 World Historic Dry Etching Equipment for Semiconductor Market Size by Country/Region (2021-2026)
  4.2.1 Global Dry Etching Equipment for Semiconductor Annual Sales by Country/Region (2021-2026)
  4.2.2 Global Dry Etching Equipment for Semiconductor Annual Revenue by Country/Region (2021-2026)
4.3 Americas Dry Etching Equipment for Semiconductor Sales Growth
4.4 APAC Dry Etching Equipment for Semiconductor Sales Growth
4.5 Europe Dry Etching Equipment for Semiconductor Sales Growth
4.6 Middle East & Africa Dry Etching Equipment for Semiconductor Sales Growth

5 AMERICAS

5.1 Americas Dry Etching Equipment for Semiconductor Sales by Country
  5.1.1 Americas Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
  5.1.2 Americas Dry Etching Equipment for Semiconductor Revenue by Country (2021-2026)
5.2 Americas Dry Etching Equipment for Semiconductor Sales by Type (2021-2026)
5.3 Americas Dry Etching Equipment for Semiconductor Sales by Application (2021-2026)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil

6 APAC

6.1 APAC Dry Etching Equipment for Semiconductor Sales by Region
  6.1.1 APAC Dry Etching Equipment for Semiconductor Sales by Region (2021-2026)
  6.1.2 APAC Dry Etching Equipment for Semiconductor Revenue by Region (2021-2026)
6.2 APAC Dry Etching Equipment for Semiconductor Sales by Type (2021-2026)
6.3 APAC Dry Etching Equipment for Semiconductor Sales by Application (2021-2026)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan

7 EUROPE

7.1 Europe Dry Etching Equipment for Semiconductor by Country
  7.1.1 Europe Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
  7.1.2 Europe Dry Etching Equipment for Semiconductor Revenue by Country (2021-2026)
7.2 Europe Dry Etching Equipment for Semiconductor Sales by Type (2021-2026)
7.3 Europe Dry Etching Equipment for Semiconductor Sales by Application (2021-2026)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia

8 MIDDLE EAST & AFRICA

8.1 Middle East & Africa Dry Etching Equipment for Semiconductor by Country
  8.1.1 Middle East & Africa Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
  8.1.2 Middle East & Africa Dry Etching Equipment for Semiconductor Revenue by Country (2021-2026)
8.2 Middle East & Africa Dry Etching Equipment for Semiconductor Sales by Type (2021-2026)
8.3 Middle East & Africa Dry Etching Equipment for Semiconductor Sales by Application (2021-2026)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries

9 MARKET DRIVERS, CHALLENGES AND TRENDS

9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends

10 MANUFACTURING COST STRUCTURE ANALYSIS

10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of Dry Etching Equipment for Semiconductor
10.3 Manufacturing Process Analysis of Dry Etching Equipment for Semiconductor
10.4 Industry Chain Structure of Dry Etching Equipment for Semiconductor

11 MARKETING, DISTRIBUTORS AND CUSTOMER

11.1 Sales Channel
  11.1.1 Direct Channels
  11.1.2 Indirect Channels
11.2 Dry Etching Equipment for Semiconductor Distributors
11.3 Dry Etching Equipment for Semiconductor Customer

12 WORLD FORECAST REVIEW FOR DRY ETCHING EQUIPMENT FOR SEMICONDUCTOR BY GEOGRAPHIC REGION

12.1 Global Dry Etching Equipment for Semiconductor Market Size Forecast by Region
  12.1.1 Global Dry Etching Equipment for Semiconductor Forecast by Region (2027-2032)
  12.1.2 Global Dry Etching Equipment for Semiconductor Annual Revenue Forecast by Region (2027-2032)
12.2 Americas Forecast by Country (2027-2032)
12.3 APAC Forecast by Region (2027-2032)
12.4 Europe Forecast by Country (2027-2032)
12.5 Middle East & Africa Forecast by Country (2027-2032)
12.6 Global Dry Etching Equipment for Semiconductor Forecast by Type (2027-2032)
12.7 Global Dry Etching Equipment for Semiconductor Forecast by Application (2027-2032)

13 KEY PLAYERS ANALYSIS

13.1 Lam Research
  13.1.1 Lam Research Company Information
  13.1.2 Lam Research Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.1.3 Lam Research Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.1.4 Lam Research Main Business Overview
  13.1.5 Lam Research Latest Developments
13.2 Tokyo Electron Limited
  13.2.1 Tokyo Electron Limited Company Information
  13.2.2 Tokyo Electron Limited Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.2.3 Tokyo Electron Limited Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.2.4 Tokyo Electron Limited Main Business Overview
  13.2.5 Tokyo Electron Limited Latest Developments
13.3 Applied Materials
  13.3.1 Applied Materials Company Information
  13.3.2 Applied Materials Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.3.3 Applied Materials Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.3.4 Applied Materials Main Business Overview
  13.3.5 Applied Materials Latest Developments
13.4 Hitachi High-Tech
  13.4.1 Hitachi High-Tech Company Information
  13.4.2 Hitachi High-Tech Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.4.3 Hitachi High-Tech Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.4.4 Hitachi High-Tech Main Business Overview
  13.4.5 Hitachi High-Tech Latest Developments
13.5 SEMES
  13.5.1 SEMES Company Information
  13.5.2 SEMES Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.5.3 SEMES Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.5.4 SEMES Main Business Overview
  13.5.5 SEMES Latest Developments
13.6 AMEC
  13.6.1 AMEC Company Information
  13.6.2 AMEC Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.6.3 AMEC Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.6.4 AMEC Main Business Overview
  13.6.5 AMEC Latest Developments
13.7 NAURA
  13.7.1 NAURA Company Information
  13.7.2 NAURA Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.7.3 NAURA Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.7.4 NAURA Main Business Overview
  13.7.5 NAURA Latest Developments
13.8 SPTS Technologies (KLA)
  13.8.1 SPTS Technologies (KLA) Company Information
  13.8.2 SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.8.3 SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.8.4 SPTS Technologies (KLA) Main Business Overview
  13.8.5 SPTS Technologies (KLA) Latest Developments
13.9 Oxford Instruments
  13.9.1 Oxford Instruments Company Information
  13.9.2 Oxford Instruments Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.9.3 Oxford Instruments Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.9.4 Oxford Instruments Main Business Overview
  13.9.5 Oxford Instruments Latest Developments
13.10 ULVAC
  13.10.1 ULVAC Company Information
  13.10.2 ULVAC Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.10.3 ULVAC Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.10.4 ULVAC Main Business Overview
  13.10.5 ULVAC Latest Developments
13.11 Plasma-Therm
  13.11.1 Plasma-Therm Company Information
  13.11.2 Plasma-Therm Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.11.3 Plasma-Therm Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.11.4 Plasma-Therm Main Business Overview
  13.11.5 Plasma-Therm Latest Developments
13.12 GigaLane
  13.12.1 GigaLane Company Information
  13.12.2 GigaLane Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.12.3 GigaLane Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.12.4 GigaLane Main Business Overview
  13.12.5 GigaLane Latest Developments
13.13 VM
  13.13.1 VM Company Information
  13.13.2 VM Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.13.3 VM Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.13.4 VM Main Business Overview
  13.13.5 VM Latest Developments
13.14 Jusung Engineering
  13.14.1 Jusung Engineering Company Information
  13.14.2 Jusung Engineering Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.14.3 Jusung Engineering Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.14.4 Jusung Engineering Main Business Overview
  13.14.5 Jusung Engineering Latest Developments
13.15 SAMCO
  13.15.1 SAMCO Company Information
  13.15.2 SAMCO Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
  13.15.3 SAMCO Dry Etching Equipment for Semiconductor Sales, Revenue, Price and Gross Margin (2021-2026)
  13.15.4 SAMCO Main Business Overview
  13.15.5 SAMCO Latest Developments

14 RESEARCH FINDINGS AND CONCLUSION
LIST OF TABLES

Table 1. Dry Etching Equipment for Semiconductor Annual Sales CAGR by Geographic Region (2021, 2025 & 2032) & ($ millions)
Table 2. Dry Etching Equipment for Semiconductor Annual Sales CAGR by Country/Region (2021, 2025 & 2032) & ($ millions)
Table 3. Major Players of Inductively Coupled Plasma (ICP)
Table 4. Major Players of Capacitive Coupled Plasma (CCP)
Table 5. Major Players of Reactive Ion Etching (RIE)
Table 6. Major Players of Deep Reactive Ion Etching (DRIE)
Table 7. Major Players of Others
Table 8. Global Dry Etching Equipment for Semiconductor Sales by Type (2021-2026) & (Units)
Table 9. Global Dry Etching Equipment for Semiconductor Sales Market Share by Type (2021-2026)
Table 10. Global Dry Etching Equipment for Semiconductor Revenue by Type (2021-2026) & ($ million)
Table 11. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Type (2021-2026)
Table 12. Global Dry Etching Equipment for Semiconductor Sale Price by Type (2021-2026) & (K US$/Unit)
Table 13. Global Dry Etching Equipment for Semiconductor Sale by Application (2021-2026) & (Units)
Table 14. Global Dry Etching Equipment for Semiconductor Sale Market Share by Application (2021-2026)
Table 15. Global Dry Etching Equipment for Semiconductor Revenue by Application (2021-2026) & ($ million)
Table 16. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Application (2021-2026)
Table 17. Global Dry Etching Equipment for Semiconductor Sale Price by Application (2021-2026) & (K US$/Unit)
Table 18. Global Dry Etching Equipment for Semiconductor Sales by Company (2021-2026) & (Units)
Table 19. Global Dry Etching Equipment for Semiconductor Sales Market Share by Company (2021-2026)
Table 20. Global Dry Etching Equipment for Semiconductor Revenue by Company (2021-2026) & ($ millions)
Table 21. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Company (2021-2026)
Table 22. Global Dry Etching Equipment for Semiconductor Sale Price by Company (2021-2026) & (K US$/Unit)
Table 23. Key Manufacturers Dry Etching Equipment for Semiconductor Producing Area Distribution and Sales Area
Table 24. Players Dry Etching Equipment for Semiconductor Products Offered
Table 25. Dry Etching Equipment for Semiconductor Concentration Ratio (CR3, CR5 and CR10) & (2024-2026)
Table 26. New Products and Potential Entrants
Table 27. Market M&A Activity & Strategy
Table 28. Global Dry Etching Equipment for Semiconductor Sales by Geographic Region (2021-2026) & (Units)
Table 29. Global Dry Etching Equipment for Semiconductor Sales Market Share Geographic Region (2021-2026)
Table 30. Global Dry Etching Equipment for Semiconductor Revenue by Geographic Region (2021-2026) & ($ millions)
Table 31. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Geographic Region (2021-2026)
Table 32. Global Dry Etching Equipment for Semiconductor Sales by Country/Region (2021-2026) & (Units)
Table 33. Global Dry Etching Equipment for Semiconductor Sales Market Share by Country/Region (2021-2026)
Table 34. Global Dry Etching Equipment for Semiconductor Revenue by Country/Region (2021-2026) & ($ millions)
Table 35. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Country/Region (2021-2026)
Table 36. Americas Dry Etching Equipment for Semiconductor Sales by Country (2021-2026) & (Units)
Table 37. Americas Dry Etching Equipment for Semiconductor Sales Market Share by Country (2021-2026)
Table 38. Americas Dry Etching Equipment for Semiconductor Revenue by Country (2021-2026) & ($ millions)
Table 39. Americas Dry Etching Equipment for Semiconductor Sales by Type (2021-2026) & (Units)
Table 40. Americas Dry Etching Equipment for Semiconductor Sales by Application (2021-2026) & (Units)
Table 41. APAC Dry Etching Equipment for Semiconductor Sales by Region (2021-2026) & (Units)
Table 42. APAC Dry Etching Equipment for Semiconductor Sales Market Share by Region (2021-2026)
Table 43. APAC Dry Etching Equipment for Semiconductor Revenue by Region (2021-2026) & ($ millions)
Table 44. APAC Dry Etching Equipment for Semiconductor Sales by Type (2021-2026) & (Units)
Table 45. APAC Dry Etching Equipment for Semiconductor Sales by Application (2021-2026) & (Units)
Table 46. Europe Dry Etching Equipment for Semiconductor Sales by Country (2021-2026) & (Units)
Table 47. Europe Dry Etching Equipment for Semiconductor Revenue by Country (2021-2026) & ($ millions)
Table 48. Europe Dry Etching Equipment for Semiconductor Sales by Type (2021-2026) & (Units)
Table 49. Europe Dry Etching Equipment for Semiconductor Sales by Application (2021-2026) & (Units)
Table 50. Middle East & Africa Dry Etching Equipment for Semiconductor Sales by Country (2021-2026) & (Units)
Table 51. Middle East & Africa Dry Etching Equipment for Semiconductor Revenue Market Share by Country (2021-2026)
Table 52. Middle East & Africa Dry Etching Equipment for Semiconductor Sales by Type (2021-2026) & (Units)
Table 53. Middle East & Africa Dry Etching Equipment for Semiconductor Sales by Application (2021-2026) & (Units)
Table 54. Key Market Drivers & Growth Opportunities of Dry Etching Equipment for Semiconductor
Table 55. Key Market Challenges & Risks of Dry Etching Equipment for Semiconductor
Table 56. Key Industry Trends of Dry Etching Equipment for Semiconductor
Table 57. Dry Etching Equipment for Semiconductor Raw Material
Table 58. Key Suppliers of Raw Materials
Table 59. Dry Etching Equipment for Semiconductor Distributors List
Table 60. Dry Etching Equipment for Semiconductor Customer List
Table 61. Global Dry Etching Equipment for Semiconductor Sales Forecast by Region (2027-2032) & (Units)
Table 62. Global Dry Etching Equipment for Semiconductor Revenue Forecast by Region (2027-2032) & ($ millions)
Table 63. Americas Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032) & (Units)
Table 64. Americas Dry Etching Equipment for Semiconductor Annual Revenue Forecast by Country (2027-2032) & ($ millions)
Table 65. APAC Dry Etching Equipment for Semiconductor Sales Forecast by Region (2027-2032) & (Units)
Table 66. APAC Dry Etching Equipment for Semiconductor Annual Revenue Forecast by Region (2027-2032) & ($ millions)
Table 67. Europe Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032) & (Units)
Table 68. Europe Dry Etching Equipment for Semiconductor Revenue Forecast by Country (2027-2032) & ($ millions)
Table 69. Middle East & Africa Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032) & (Units)
Table 70. Middle East & Africa Dry Etching Equipment for Semiconductor Revenue Forecast by Country (2027-2032) & ($ millions)
Table 71. Global Dry Etching Equipment for Semiconductor Sales Forecast by Type (2027-2032) & (Units)
Table 72. Global Dry Etching Equipment for Semiconductor Revenue Forecast by Type (2027-2032) & ($ millions)
Table 73. Global Dry Etching Equipment for Semiconductor Sales Forecast by Application (2027-2032) & (Units)
Table 74. Global Dry Etching Equipment for Semiconductor Revenue Forecast by Application (2027-2032) & ($ millions)
Table 75. Lam Research Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 76. Lam Research Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 77. Lam Research Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 78. Lam Research Main Business
Table 79. Lam Research Latest Developments
Table 80. Tokyo Electron Limited Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 81. Tokyo Electron Limited Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 82. Tokyo Electron Limited Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 83. Tokyo Electron Limited Main Business
Table 84. Tokyo Electron Limited Latest Developments
Table 85. Applied Materials Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 86. Applied Materials Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 87. Applied Materials Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 88. Applied Materials Main Business
Table 89. Applied Materials Latest Developments
Table 90. Hitachi High-Tech Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 91. Hitachi High-Tech Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 92. Hitachi High-Tech Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 93. Hitachi High-Tech Main Business
Table 94. Hitachi High-Tech Latest Developments
Table 95. SEMES Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 96. SEMES Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 97. SEMES Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 98. SEMES Main Business
Table 99. SEMES Latest Developments
Table 100. AMEC Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 101. AMEC Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 102. AMEC Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 103. AMEC Main Business
Table 104. AMEC Latest Developments
Table 105. NAURA Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 106. NAURA Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 107. NAURA Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 108. NAURA Main Business
Table 109. NAURA Latest Developments
Table 110. SPTS Technologies (KLA) Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 111. SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 112. SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 113. SPTS Technologies (KLA) Main Business
Table 114. SPTS Technologies (KLA) Latest Developments
Table 115. Oxford Instruments Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 116. Oxford Instruments Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 117. Oxford Instruments Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 118. Oxford Instruments Main Business
Table 119. Oxford Instruments Latest Developments
Table 120. ULVAC Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 121. ULVAC Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 122. ULVAC Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 123. ULVAC Main Business
Table 124. ULVAC Latest Developments
Table 125. Plasma-Therm Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 126. Plasma-Therm Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 127. Plasma-Therm Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 128. Plasma-Therm Main Business
Table 129. Plasma-Therm Latest Developments
Table 130. GigaLane Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 131. GigaLane Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 132. GigaLane Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 133. GigaLane Main Business
Table 134. GigaLane Latest Developments
Table 135. VM Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 136. VM Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 137. VM Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 138. VM Main Business
Table 139. VM Latest Developments
Table 140. Jusung Engineering Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 141. Jusung Engineering Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 142. Jusung Engineering Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 143. Jusung Engineering Main Business
Table 144. Jusung Engineering Latest Developments
Table 145. SAMCO Basic Information, Dry Etching Equipment for Semiconductor Manufacturing Base, Sales Area and Its Competitors
Table 146. SAMCO Dry Etching Equipment for Semiconductor Product Portfolios and Specifications
Table 147. SAMCO Dry Etching Equipment for Semiconductor Sales (Units), Revenue ($ Million), Price (K US$/Unit) and Gross Margin (2021-2026)
Table 148. SAMCO Main Business
Table 149. SAMCO Latest Developments

LIST OF FIGURES

Figure 1. Picture of Dry Etching Equipment for Semiconductor
Figure 2. Dry Etching Equipment for Semiconductor Report Years Considered
Figure 3. Research Objectives
Figure 4. Research Methodology
Figure 5. Research Process and Data Source
Figure 6. Global Dry Etching Equipment for Semiconductor Sales Growth Rate 2021-2032 (Units)
Figure 7. Global Dry Etching Equipment for Semiconductor Revenue Growth Rate 2021-2032 ($ millions)
Figure 8. Dry Etching Equipment for Semiconductor Sales by Geographic Region (2021, 2025 & 2032) & ($ millions)
Figure 9. Dry Etching Equipment for Semiconductor Sales Market Share by Country/Region (2025)
Figure 10. Dry Etching Equipment for Semiconductor Sales Market Share by Country/Region (2021, 2025 & 2032)
Figure 11. Product Picture of Inductively Coupled Plasma (ICP)
Figure 12. Product Picture of Capacitive Coupled Plasma (CCP)
Figure 13. Product Picture of Reactive Ion Etching (RIE)
Figure 14. Product Picture of Deep Reactive Ion Etching (DRIE)
Figure 15. Product Picture of Others
Figure 16. Global Dry Etching Equipment for Semiconductor Sales Market Share by Type in 2026
Figure 17. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Type (2021-2026)
Figure 18. Dry Etching Equipment for Semiconductor Consumed in Logic and Memory
Figure 19. Global Dry Etching Equipment for Semiconductor Market: Logic and Memory (2021-2026) & (Units)
Figure 20. Dry Etching Equipment for Semiconductor Consumed in Power Device
Figure 21. Global Dry Etching Equipment for Semiconductor Market: Power Device (2021-2026) & (Units)
Figure 22. Dry Etching Equipment for Semiconductor Consumed in MEMS
Figure 23. Global Dry Etching Equipment for Semiconductor Market: MEMS (2021-2026) & (Units)
Figure 24. Dry Etching Equipment for Semiconductor Consumed in Others
Figure 25. Global Dry Etching Equipment for Semiconductor Market: Others (2021-2026) & (Units)
Figure 26. Global Dry Etching Equipment for Semiconductor Sale Market Share by Application (2025)
Figure 27. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Application in 2026
Figure 28. Dry Etching Equipment for Semiconductor Sales by Company in 2026 (Units)
Figure 29. Global Dry Etching Equipment for Semiconductor Sales Market Share by Company in 2026
Figure 30. Dry Etching Equipment for Semiconductor Revenue by Company in 2026 ($ millions)
Figure 31. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Company in 2026
Figure 32. Global Dry Etching Equipment for Semiconductor Sales Market Share by Geographic Region (2021-2026)
Figure 33. Global Dry Etching Equipment for Semiconductor Revenue Market Share by Geographic Region in 2026
Figure 34. Americas Dry Etching Equipment for Semiconductor Sales 2021-2026 (Units)
Figure 35. Americas Dry Etching Equipment for Semiconductor Revenue 2021-2026 ($ millions)
Figure 36. APAC Dry Etching Equipment for Semiconductor Sales 2021-2026 (Units)
Figure 37. APAC Dry Etching Equipment for Semiconductor Revenue 2021-2026 ($ millions)
Figure 38. Europe Dry Etching Equipment for Semiconductor Sales 2021-2026 (Units)
Figure 39. Europe Dry Etching Equipment for Semiconductor Revenue 2021-2026 ($ millions)
Figure 40. Middle East & Africa Dry Etching Equipment for Semiconductor Sales 2021-2026 (Units)
Figure 41. Middle East & Africa Dry Etching Equipment for Semiconductor Revenue 2021-2026 ($ millions)
Figure 42. Americas Dry Etching Equipment for Semiconductor Sales Market Share by Country in 2026
Figure 43. Americas Dry Etching Equipment for Semiconductor Revenue Market Share by Country (2021-2026)
Figure 44. Americas Dry Etching Equipment for Semiconductor Sales Market Share by Type (2021-2026)
Figure 45. Americas Dry Etching Equipment for Semiconductor Sales Market Share by Application (2021-2026)
Figure 46. United States Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 47. Canada Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 48. Mexico Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 49. Brazil Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 50. APAC Dry Etching Equipment for Semiconductor Sales Market Share by Region in 2026
Figure 51. APAC Dry Etching Equipment for Semiconductor Revenue Market Share by Region (2021-2026)
Figure 52. APAC Dry Etching Equipment for Semiconductor Sales Market Share by Type (2021-2026)
Figure 53. APAC Dry Etching Equipment for Semiconductor Sales Market Share by Application (2021-2026)
Figure 54. China Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 55. Japan Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 56. South Korea Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 57. Southeast Asia Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 58. India Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 59. Australia Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 60. China Taiwan Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 61. Europe Dry Etching Equipment for Semiconductor Sales Market Share by Country in 2026
Figure 62. Europe Dry Etching Equipment for Semiconductor Revenue Market Share by Country (2021-2026)
Figure 63. Europe Dry Etching Equipment for Semiconductor Sales Market Share by Type (2021-2026)
Figure 64. Europe Dry Etching Equipment for Semiconductor Sales Market Share by Application (2021-2026)
Figure 65. Germany Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 66. France Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 67. UK Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 68. Italy Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 69. Russia Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 70. Middle East & Africa Dry Etching Equipment for Semiconductor Sales Market Share by Country (2021-2026)
Figure 71. Middle East & Africa Dry Etching Equipment for Semiconductor Sales Market Share by Type (2021-2026)
Figure 72. Middle East & Africa Dry Etching Equipment for Semiconductor Sales Market Share by Application (2021-2026)
Figure 73. Egypt Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 74. South Africa Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 75. Israel Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 76. Turkey Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 77. GCC Countries Dry Etching Equipment for Semiconductor Revenue Growth 2021-2026 ($ millions)
Figure 78. Manufacturing Cost Structure Analysis of Dry Etching Equipment for Semiconductor in 2026
Figure 79. Manufacturing Process Analysis of Dry Etching Equipment for Semiconductor
Figure 80. Industry Chain Structure of Dry Etching Equipment for Semiconductor
Figure 81. Channels of Distribution
Figure 82. Global Dry Etching Equipment for Semiconductor Sales Market Forecast by Region (2027-2032)
Figure 83. Global Dry Etching Equipment for Semiconductor Revenue Market Share Forecast by Region (2027-2032)
Figure 84. Global Dry Etching Equipment for Semiconductor Sales Market Share Forecast by Type (2027-2032)
Figure 85. Global Dry Etching Equipment for Semiconductor Revenue Market Share Forecast by Type (2027-2032)
Figure 86. Global Dry Etching Equipment for Semiconductor Sales Market Share Forecast by Application (2027-2032)
Figure 87. Global Dry Etching Equipment for Semiconductor Revenue Market Share Forecast by Application (2027-2032)